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- Clean room comprehensive performance testing project
1. Temperature and relative humidity:
The air-conditioning system has been operating and various conditions have stabilized. At least one temperature measurement point is set in each temperature control zone, and the measurement point is set at the working height of the specified position. After the display is stable, record the temperature reading of each measurement point. The measurement time is not less than 5 minutes, and at least one reading per minute is recorded.
2. Wind speed measurement:
For a one-way flow clean room, take the section 0.3m from the high-efficiency filter perpendicular to the airflow as the sampling section. The distance between the measuring points on the section should not be greater than 0.6m, the number of measuring points should not be less than 5, and the arithmetic average of all readings As the average wind speed.
During the test, the air flow hood should be firmly attached to the entire air flow hood, and the four sides of the air flow hood should be attached to the periphery of the air outlet. After the value displayed on the screen is relatively stable, read and record. The test time for each point should not be less than 10s, and the number of measuring points for each test position should not be less than 3 points. The sum of the air volume of all tuyere is the total air volume.
*The number of air changes: the number of air changes = the total air volume of the clean room ¡Â the volume of the clean room
4. Static pressure difference:
The measurement of static pressure difference should be carried out when all doors are closed. When there is exhaust, it should be carried out under the condition of maximum exhaust air volume, and the pressure difference of adjacent communicating rooms should be measured from the innermost room on the plane to the outside. Measure the pressure difference between the clean area, the non-clean area, and the outdoor environment.
5. Suspended particles:
For any small clean room or local air purification area, the number of sampling points shall not be less than 2, and the total sampling frequency has to be 5 times. It can be calculated according to the formula: NL=A0.5.
Sampling points:
a. Sampling points are generally evenly arranged on a horizontal plane 0.8m above the ground;
b. When arranging sampling points, avoid the air return vents.
6. Planktonic bacteria:
The minimum number of sampling points corresponds to the number of suspended particles sampling points above.
The measuring point of the working area is about 0.8m~1.5m above the ground (slightly higher than the working surface); the measuring point of the air supply outlet is about 30cm away from the air supply surface; measuring points can be added to key equipment or key work activities. Each sampling point is generally sampled once.
a. After all sampling is over, place the petri dish upside down in a constant temperature incubator for culture;
b. Cultivate in an incubator at 30¡ãC~35¡ãC for no less than 48h;
c. Each batch of culture medium should have a control test to check whether the culture medium itself is contaminated. Three petri dishes can be selected for control culture in each batch.
The position of the sampling point in the work area is slightly higher than the working surface; place the prepared petri dish at the sampling point, open the petri dish cover, expose the surface of the culture medium for 0.5h, and then cover the petri dish and turn it upside down. The culture conditions are the same as planktonic bacteria.
8. Noise:
The measuring point is 1.1m above the ground.
If the clean room area is less than 15 square meters, only one point in the center of the room can be measured;
If the area is more than 15 square meters, in addition to the 1 point in the center of the test room, 4 points on the opposite corners should be measured, 1m away from the side wall, and the measuring points are facing each corner.
9. Illumination:
The measuring point plane is 0.8m away from the ground and arranged at a distance of 1m~2m. The measuring point for rooms within 30 square meters is 0.5m away from the wall, and the measuring point for rooms over 30 square meters is 1m away from the wall.
10. Self-purification time:
1) Increase the initial concentration to reach or exceed the target by 100 times, the specific methods:
Turn off the air conditioning purification system, use Balan cigarettes to smoke for 2min-3min, and turn on the particle counter to monitor. The particle count confirms that the 0.5um particle concentration has exceeded 100 times the target concentration. Pay attention to the time t100n when the particle concentration reaches 100¡Áthe target concentration.
2) Turn on the purification system, the minimum interval for starting the measurement is 1 minute, pay attention to the time tn when the particle concentration reaches the target concentration.
3) Calculate the self-cleaning time: 100:1 Self-cleaning time is t0.01=(tn-t100n)
11. Airtight leak detection:
Airtightness testing is to determine whether the clean room (area) has contaminated air invading from the surrounding clean room (area) or non-clean room (area) with the same or different static pressure and lower cleanliness level.
1) The particle counter method is used to detect the airtightness of the clean room (area). The concentration of suspended particles close to the outer surface of the tested enclosure structure should be measured first. Generally, this concentration should be 103 greater than the concentration in the clean room (area). And more than or equal to 3.5¡Á106 particles/m3 particle size to be measured.
2) The construction joints of the clean room (area), including the leakage detection of the joints of wall panels, ceiling joints, pipelines, lamps, etc., should be scanned at 50mm~100mm of the tested part, and the scanning speed is 50mm/s.
12. Air flow pattern:
Airflow pattern detection is to determine the influence of indoor equipment and facilities on airflow, and to select or improve the airflow pattern to produce the least turbulence and maximum clarity.
1) Layout of measuring points:
Choose one vertical one-way flow clean room, one vertical and one cross-section, and one horizontal plane with a height of 0.8m and 1.5m from the ground;
For the horizontal unidirectional flow clean room, choose one vertical section and one horizontal plane of the working area;
For the turbulent clean room, choose one horizontal plane passing through the longitudinal and transverse sections of the representative air outlet center and the height of the working area.
2) Test operation:
At each measuring point, the atomizer is used to emit smoke according to the position of the distribution point, and the smoke generator is moved on the measured plane, and the tester visually observes the change of the smoke with the movement of the airflow. And use digital equipment to record the test situation.
13. Detection of ozone concentration:
1) Turn off the air supply system of the air conditioner, and turn off the fresh air and direct exhaust air.
2) Under static conditions, turn on the ozone generator, place the ozone analyzer in the room to be tested, turn on the instrument and leave the room after the system is balanced, and record the opening time. After a certain period of time, the inspector enters the room under test to observe the ozone concentration, and when the concentration reaches the qualified concentration, the time is recorded.
3) Verification of the retention time of the qualified concentration: monitor the tested room for a certain period of time and record the concentration. And observe whether its concentration will fall below the qualified concentration.
4) Verification of disappearance concentration time: After all rooms are verified, turn off the ozone generator, turn on fresh air and direct exhaust, record the time required for the room's ozone concentration to drop to a safe concentration, turn off the power of the instrument and leave the room.
14. High efficiency filter leak detection:
1) Introduction of aerosol smoke
a. Leak detection of the system can directly put the aerosol generator into the air conditioner to emit smoke.
b. For the high-efficiency filters on laminar flow hoods, ultra-clean benches and biological safety cabinets, aerosol smoke can be directly introduced from the negative pressure side of the system fan (fan suction port).
2) Initialization of aerosol photometer
a. After initialization, the device will automatically establish a zero point.
b. Set the upstream 100% concentration, and the concentration on the upwind side of the filter is generally 20-30ug/L.
3) Detection operation
a. After the upstream 100% concentration is successfully set, the leak test can be performed by pressing the "last 100% setting" option. Scan the entire section of the inspected filter, the sealing head and the installation frame. The scanning speed is about 2cm/s, and the distance between the sampling probe and the air outlet surface of the filter and the frame structure is about 3cm.
b. During the scanning leak detection process, in order to confirm the stability of the upwind aerosol concentration, the upwind aerosol concentration should be re-measured at appropriate time intervals, generally after 10 filters have been tested.
c. When scanning any sign that is equal to or greater than the specified limit, the scanning probe should be kept in the corresponding position for a considerable period of time, and the judgment should be made based on the actual maximum value of the position for a long time. d. Draw a schematic diagram on the original record, indicating the location of the leak and the maximum value of the leak.
15. Total number of bacterial colonies:
a. The total number of bacterial colonies in the air:
Under the dynamics. When sampling, place the plate containing nutrient agar medium at the sampling point (approximately the height of the tabletop), open the lid of the plate, expose the plate to the air for a certain period of time, and send it for inspection and culture.
b. The total number of bacterial colonies on the surface of the workbench:
Place the sterilized specification board on the surface of the object to be inspected, use a cotton swab soaked with sterile normal saline to smear it back and forth, then cut off the part of the cotton swab that touches the hand, and put the cotton swab into the sampling tube of sterilized normal saline. Check.
c. Total number of bacterial colonies on the surface of workers' hands:
Put the five fingers of the subject together, use a cotton swab soaked in normal saline on the curved surface of the right finger, rub it back and forth from the tip of the finger to the tip of the finger, then cut off the part of the cotton swab in contact with the hand, and put the cotton swab into the sampling tube of sterilized normal saline for inspection .
16. Ultraviolet intensity:
Ultraviolet light intensity illuminance meter measurement method: After turning on the ultraviolet lamp for 5 minutes, place the ultraviolet irradiance meter probe at the center of the tested ultraviolet lamp at a vertical distance of 1m. After the meter is stabilized, the data shown is the radiation of the ultraviolet lamp. Illumination value.
17. Static detection:
Detect between a group of 2 points or several groups of 2 points selected on the surface of the human activity area. Place the two test lines of the meter at the two ends of EARTH and LINE, and connect the two test clamps to the two standard electrodes. The standard electrode is placed on the surface of the object to be measured, and the resistance value between the two points is obtained by reading after the meter is stable.